Investigation of angular and energy distributions of exited sputtered and scattered particles by using a Doppler method

Abstract

The recently proposed Doppler tomography method enabled the investigations of the angular and energy distributions of exited sputtered and scattered atoms and ions. A simple mathematical and experimental implementation of DT is described. It is applied to the investigation of exited particle emission due to ion bombardment of poly-crystals along the normal to the surface. Data on angular and energy distributions of the sputtered excited Al atoms and scattered exited K ions are presented.